Declension table of ?sūkṣmātman

Masculine	Singular	Dual	Plural
Nominative	sūkṣmātmā	sūkṣmātmānau	sūkṣmātmānaḥ
Vocative	sūkṣmātman	sūkṣmātmānau	sūkṣmātmānaḥ
Accusative	sūkṣmātmānam	sūkṣmātmānau	sūkṣmātmanaḥ
Instrumental	sūkṣmātmanā	sūkṣmātmabhyām	sūkṣmātmabhiḥ
Dative	sūkṣmātmane	sūkṣmātmabhyām	sūkṣmātmabhyaḥ
Ablative	sūkṣmātmanaḥ	sūkṣmātmabhyām	sūkṣmātmabhyaḥ
Genitive	sūkṣmātmanaḥ	sūkṣmātmanoḥ	sūkṣmātmanām
Locative	sūkṣmātmani	sūkṣmātmanoḥ	sūkṣmātmasu

Compound sūkṣmātma -

Adverb -sūkṣmātmam